A modular structure for a highly detailed model of semiconductor manufacturing

Abstract

The development of a model of semiconductor manufacturing lines using the discrete event simulation language SIMAN is described. This detailed, flexible, and generic model of a large, complex system was constructed by using a highly modular structure. A user interacts with the model through an interface which requires no programming and no recompiling even if major changes to the process sequence, number of resources (tools and operators), queue control, or number of job types are made.