A new high resolution reflection scanning electron microscope

Abstract

A new high resolution reflection scanning electron microscope has been built with a lanthanum hexaboride cathode electron gun, a contamination-free vacuum system, and in which the deteriorating eflects of vibration and ac stray field interference have been reduced below significant levels. The microscope produces a minimum probe diameter of 30±7 Å with a current of 10-12 A at a working distance of 7 mm and an accelerating voltage of 23 kV. Point-to-point resolution of 50±10 Å has been measured in scanning reflection. © 1969 The American Institute of Physics.