PublicationThin Solid FilmsPaperAbsence of non-shorting breakdown behaviour in AlSi3N4Si structuresThin Solid FilmsView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jan 1975PublicationThin Solid FilmsAuthorsN. KleinC.M. OsburnJ.M. EldridgeIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare