Al-Ta bilayer as an oxidation resistant barrier for electrode structures in high dielectric constant capacitors

Abstract

Aluminum-tantalum bilayers have been investigated for their potential to serve as conductive barriers to oxygen diffusion when annealed at conditions corresponding to crystallization of perovskite dielectrics such as lead lanthanum titanate (PLT). Ta (50 nm)/Al (15 nm) structures have been deposited on Si substrates and annealed in oxygen at 650 and 700°C for various amounts of time. The as-deposited and annealed structures have been characterized by x-ray diffraction (XRD), Rutherford backscattering spectroscopy (RBS), and Auger electron spectroscopy (AES) analysis and by four-point probe electrical measurements. It has been found that the Al-Ta structures can withstand complete oxidation when exposed to oxygen at 650°C for 30 min or 700°C for 1 min and the oxide layer formed at the surface of the structure acts as a barrier for further oxygen diffusion. When a PLT film was deposited directly on the Al-Ta structures intermixing took place. It was therefore necessary to insert a Pt layer between the Al-Ta barrier and PLT layer. In such a case the PLT showed electrical properties similar to those obtained when deposited on SiO2/Pt; however, the Al-Ta structure did interact with Pt during the perovskite formation anneal. It has been found that this interaction can be prevented by preannealing the Al-Ta, in oxygen, prior to the deposition of Pt.