An x-y-z stage for scanning proximity microscopes using elastic elements

Abstract

A stage design is presented that allows coarse motion of the sample in an STM-type instrument. The stage utilizes the bending motion of springs driven by micrometers to achieve coarse motion in x, y, and z, and has no sliding parts other than the micrometers themselves. The design is compact, precise, and has excellent vibration and thermal drift characteristics. © 1991, American Institute of Physics. All rights reserved.