Characterization and modeling of metal finger capacitors

Abstract

An interdigitated metal finger capacitor is a device of low cost, high capacitance density, superior voltage linearity, and high quality factor. We present a method of systematically characterizing and modeling the capacitance and resistance of metal finger capacitors. It includes a scalable capacitance model for metal finger capacitors made of same metal levels and a set of capacitance relations for metal finger capacitors consisting of different metal levels in a semiconductor technology. We also discuss how to maximize the quality factor of a metal finger capacitor.