Conducting polyanilines: properties and applications in microelectronics

Abstract

In the last few years, the polyaniline class of conducting polymers has been of considerable scientific and technological interest. This unique family of polymers combine solution processability, environmental stability and extensive chemical versatility. This talk will first describe new derivatives of polyaniline. These include water soluble derivatives which exhibit conductivity on the order of 10-3 S/cm and organic based derivatives which exhibit conductivity on the order of 200 S/cm. These materials have been shown to be suitable for broad range of applications in microelectronics ranging from the device level to the package level to the final electronic product. First, the water based polymers can be used as removable charge dissipators for electron beam lithography and SEM metrology as well as permanent coatings for electrostatic discharge protection of electronic equipment. The polyaniline can be made radiation sensitive resulting in conducting resist capable of submicron resolution. The more conducting derivatives will be shown to be usable for metallization, electromagnetic interference shielding, and as patternable electrodes for liquid crystal displays.