Electron beam testing of circuits at liquid nitrogen temperature

Abstract

An electron beam tester has been modified so that circuits being tested can be cooled to liquid nitrogen temperature. This enables voltage contrast imaging, and internal node probing, of low‐temperature circuits. Waveform measurements made in this way reveal details of low‐temperature circuit operation which cannot be easily obtained by any other means. Copyright © 1990 Foundation for Advances in Medicine and Science, Inc.