PublicationISHVAC 2011Conference paperEvaluation of electrodeposited photoresists for use in the fabrication of an optochip silicon interposerISHVAC 2011AbstractNo abstract available.Home↳ PublicationsDate01 Dec 2011PublicationISHVAC 2011AuthorsCornelia K. TsangJanet OkadaEric HuengerIBM-affiliated at time of publicationShare