Low temperature CVD garnet growth

Abstract

Epitaxial garnet films of Er3Fe5O12, (Eu, Y)3Fe5O12 and (Eu, Yb)3Fe5O12 which exhibit submicron magnetic stripe domains have been chemically vapor deposited (CVD) on non-magnetic garnet substrates. The deposition process which uses metal organic source compounds was carried out at relatively low temperatures, 800-1000°C. Both stress induced and growth induced magnetic anisotropy have been produced in the films, the latter of which was observed for the first time in CVD garnet films. © 1979.