Publication
IEDM 2003
Conference paper

Low voltage, scalable nanocrystal FLASH memory fabricated by templated self assembly

Abstract

We introduce a new method for building nanocrystal FLASH memory devices that achieves precise control of nanocrystal size and position. Nanocrystal dimensions are defined via polymer self assembly, facilitating device scaling. Devices exhibit low voltage memory operation with promising retention and endurance properties.

Date

Publication

IEDM 2003

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