Paper

Measurement of the velocity distribution of sputtered Na atoms from NaCl by Doppler shift laser fluorescence

Abstract

The velocity distribution of sputtered Na atoms from NaCl during 15 keV, Ar+ bombardment was measured by a Doppler shift laser fluorescence technique. Contrary to other measurements, the sputtered Na atoms were found to have a velocity distribution identical to that of a three-dimensional Maxwell-Boltzmann gas.

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