Measuring chromatic aberration in LEEM/PEEM

Abstract

Measurement of chromatic aberration in a Low Energy Electron Microscope (LEEM) or Photo Electron Emission Microscope (PEEM) is necessary for quantitative image interpretation, and for accurate correction of chromatic aberration in an aberration-corrected instrument. While methods have been developed for measuring the spherical aberration coefficient, C 3 , measuring the chromatic aberration coefficient, C c , remains a more difficult task. Here a novel method is introduced to simplify such measurements. The viability and accuracy is demonstrated using detailed electron-optical ray-tracing calculations. Experimental results show that the method is easily reduced to practice.