Monitoring Contaminant Particles In Gases: A Review

Abstract

Especially in the microelectronics and pharmaceutica1 industries, particles that are microns in size and even smaller lessen the quality and quantity of the products produced. Reducing losses due to contamination requires detecting particles in air, in other gases, and in liquids, as well as on surfaces. This review covers the monitoring of particles in gases, from the perspective of contamination control primarily in the microelectronics industry. © 1988 by Hemisphere Publishing Corporation.