PublicationADMETA 2011Conference paperNew classes of ULK dielectrics with superior thermomechanical propertiesADMETA 2011AbstractNo abstract available.Home↳ PublicationsDate01 Dec 2011PublicationADMETA 2011AuthorsYusuke MatsudaSean W. KingGeraud DuboisJeff BielefeldJitendra RathoreLeonard InterranteReinhold H. DauskardtIBM-affiliated at time of publicationTopicsPhysical SciencesShare