ONE-DIMENSIONAL MODEL OF COUNTER-DIFFUSION IN A LEAK FROM A CLEAN ROOM.

Abstract

Typically, clean rooms are kept at pressures somewhat higher than that of the areas next to them so that any leakage would be out of the clean area into the dirty area. It is generally assumed that such flow is adequate to prevent the transport of contaminants through the leakage path back into the room, against the leakage flow. This paper presents a simple model to help determine what flow velocities are adequate to prevent contamination of the room. An example application is included.