Plasma-deposited diamondlike carbon and related materials

Abstract

Diamondlike carbon (DLC) prepared by plasma-enhanced CVD is a metastable amorphous material characterized by attractive optical, electrical, chemical, and tribological properties. DLC films can be prepared at low temperatures from a large variety of precursors, and can be modified by the incorporation of different elements such as N, F, Si, or metals. The diversity of plasma conditions and precursors used for the deposition of DLC films provides flexibility to tailor their properties for specific needs and potential applications. This paper presents a review of the preparation of DLC and related materials, their properties, and their use in different applications. © 1999 IBM.