Prospect for active matrix displays on plastic

Abstract

We review the status of active matrix display fabrication on plastic substrates, specifically active matrix liquid crystal displays (AM LCDs). Research efforts in the U.S. and Europe are surveyed. Currently available transparent plastics, and active programs to improve these materials are described. Our work on thin film transistor (TFT) fabrication at 125°C is then reported, with a comparison of reactive sputtering and plasma enhanced CVD methods.