Quantitative X‐ray energy dispersive analysis with the transmission electron microscope

Abstract

A Comprehensive study of the interfacing of an X‐ray energy dispersive spectrometer to a transmission electron microscope is presented. Optimum detector location, sample tilt, collimation and accelerating voltage are discussed. Quantitative elemental analysis is obtained for thin film specimens using corrections for spectrometer response, absorption and background. Peak spectra are sorted using a method of profile fitting based on nonlinear simplex minimization. Using a simple analysis scheme, the peak data is reduced to elemental composition with an accuracy and precision on the order of 1%. Examples from Fe–Ni and Ho–Co alloys are given. Copyright © 1975 Heyden & Son Limited