PublicationMicroelectronic EngineeringPaperResist materialsMicroelectronic EngineeringView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jan 1985PublicationMicroelectronic EngineeringAuthorsScott A. MacDonaldJean M.J. FrechetHiroshi ItoC Grant WillsonIBM-affiliated at time of publicationTopicsPhysical SciencesShare