PublicationISTDM 2006Conference paperSingle wafer sSOI by SIMOXISTDM 2006View publicationAbstractNo abstract available.Home↳ PublicationsDate15 May 2006PublicationISTDM 2006AuthorsJ.P. De SouzaS.W. BedellH.J. HovelK.E. FogelA. ReznicekD.K. SadanaIBM-affiliated at time of publicationTopicsComputer ScienceShare