PublicationJVSTAPaperSummary Abstract: Titanium silicide films prepared by reactive sputteringJVSTAView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jan 1985PublicationJVSTAAuthorsV. DelineF.M. d’HeurleIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare