Surface loss coefficients for the silyl radical

Abstract

Direct loss measurements for the heterogeneous reaction of the silyl radical, SiH3, obtained in a discharge flow reactor with mass spectrometric detection, are reported. From these measurements and the calculated gas-surface collision frequency, total surface loss coefficients, β, are determined for silyl on two different surfaces, one coated with a growing silicon-containing film and the other coated with Halocarbon wax. © 1993 American Chemical Society.