Towards cube-sized compute nodes: Advanced packaging concepts enabling extreme 3D integration

Abstract

Novel heat removal and power delivery topologies are required to enable 'extreme 3D integration' with cube-sized compute nodes. Therefore, a technology roadmap is presented supporting memory-on-logic and logic-on-logic in the medium and long-term, by (i) dual-side cooling and integrated voltage regulators, and (ii) interlayer cooling and electrochemical power delivery.