PublicationIEEE T-EDPaperVA-3 Hydrogenation Effects on Polysilicon Thin-Film Transistor StructuresIEEE T-EDView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jan 1992PublicationIEEE T-EDAuthorsM.K. HatalisJ.A. KungJerzy KanickiJ. KanickiIBM-affiliated at time of publicationShare