Publication
IEDM 1994
Conference paper
VIDS: Visual interpretation for device simulations
Abstract
Visualization is an increasingly important aspect of device design to interpret simulation and empirical data; effective visualization tools can accelerate the design process. VIDS is a set of interactive tools for 2D and 3D device models, 2D process models, lithography data, 2D and 3D interconnect analysis, and empirical STM scans. VIDS features and several examples are presented.