High resolution polymer pattern fabrications with Low energy proton beams
- H. Hiraoka
- 1984
- Microlithography 1984
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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32 results for Hiroyuki Hiraoka
Image hardenings by uv-, pulsed-electron beams and crosslinking agents
- Hiroyuki Hiraoka
- 1989
- J. Photopolym. Sci. Tech.
Contrast Enhancement and Resist Wall Profile Control by Surface Crosslinkage
- H. Hiraoka
- 1988
- J. Photopolym. Sci. Tech.
Electron Beam-Induced Reactions of Orthonaphthoquinone-Diazide-Sulfonyl Derivatives in Phenolic-Type Resins
- Hiroyuki Hiraoka
- Adolfo R. Gutierrez
- 2019
- JES
All Dry Lithography Processes and Mechanistic Studies with Poly(methacrylonitrile) and Related Polymers
- H. Hiraoka
- 2019
- JES
High Temperature Flow Resistance of Micron Sized Images in AZ Resists
- H. Hiraoka
- J. Pacansky
- 2019
- JES
Low Energy Proton Beam Lithography with a Thin Oxygen-Etch Barrier Layer
- H. Hiraoka
- 2019
- JES
Soft vacuum, pulsed electron-beam hardening of lithographic polymers
- J. Krishnaswamy
- L. Li
- et al.
- 2011
- Journal of Materials Research
High-resolution polymer replication of surface topography
- Hiroyuki Hiraoka
- 2008
- Applied Physics Letters
ESCA and Mass Spectroscopic Studies of Degradations of Poly[bis(trifluoroethoxy)phosphazene]: Pyrolysis, Ultraviolet Light, and Electron Beam Induced Degradations
- Hiroyuki Hiraoka
- Wen-yaung Lee
- et al.
- 2002
- Macromolecules