Polymer degradation in reactive ion etching and its possible application to all dry processes
- H. Hiraoka
- L.W. Welsh Jr.
- 1981
- Radiation Physics and Chemistry
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32 results for Hiroyuki Hiraoka
In situ preparation of lithographic resists containing glutarimide groups
- Hiroyuki Hiraoka
- Edward Gipstein
- et al.
- 1978
- Journal of Applied Polymer Science