Energy Considerations in the Deposition of High-Quality Plasma-Enhanced CVD Silicon Dioxide
- E. Tierney
- J. Batey
- et al.
- 2019
- JES
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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2 results for W.A. Pliskin
Infrared and high-energy electron diffraction analyses of electron-beam-evaporated MgO films
- M.O. Aboelfotoh
- K.C. Park
- et al.
- 2008
- Journal of Applied Physics