Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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14 results for M. Chen

Practical dc squids with extremely low 1/f noise
- - C.D. Tesche
  - K.H. Brown
  - et al.
- 1985
- IEEE Transactions on Magnetics
Reactive etching mechanism of tungsten silicide in CF₄-O₂ plasma
- - Young H. Lee
  - Mao-Min Chen
  - et al.
- 1984
- Thin Solid Films
Silicon etching mechanism and anisotropy in CF₄+O₂ plasma
- - Young H. Lee
  - Mao-Min Chen
- 1983
- Journal of Applied Physics
Plasma etching of niobium with CF₄/O₂ gases
- - Mao-Min Chen
  - Run Han Wang
- 1983
- JVSTA