On the possibility of measuring the diffraction pattern of single micro objects
- D. Sayre
- R.P. Haelbich
- et al.
- 1989
- Proceedings of SPIE 1989
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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7 results for Rolf-Peter Haelbich
Synchrotron radiation x-ray lithography: Recent results
- Jerome P. Silverman
- Rolf P. Haelbich
- et al.
- 1989
- Proceedings of SPIE 1989
Optimization of the optics matching a storage ring to an X-ray lithography camera
- Rolf P. Haelbich
- 1989
- Proceedings of SPIE 1989
X-ray lithography exposures using synchrotron radiation
- Jerome P. Silverman
- Rolf P. Haelbich
- et al.
- 1989
- Proceedings of SPIE 1989
Smooth multilayer films suitable for x-ray mirrors
- Rolf-Peter Haelbich
- Armin Segmüller
- et al.
- 2008
- Applied Physics Letters
Controlled fabrication of multilayer soft-x-ray mirrors
- Eberhard Spiller
- Armin Segmüller
- et al.
- 2008
- Applied Physics Letters
Synchrotrom radiation X-ray lithography
- R.P. Haelbich
- J. Silverman
- et al.
- 1984
- Nuclear Instruments and Methods In Physics Research