Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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7 results for C.J. Merz

NITRIDED SiO//2 FILMS FOR VLSI APPLICATIONS.
- - A. Ray
  - C.J. Merz
  - et al.
- 1984
- ECS Meeting 1984
NITRIDED SiO//2 FILMS FOR VLSI APPLICATIONS.
- - A. Ray
  - C.J. Merz
  - et al.
- 1984
- ECS Meeting 1984
Anomalous Etch Structures Using Ethylenediamine-Pyrocatechol-Water Based Etchants and Their Elimination
- - A. Reisman
  - M. Berkenblit
  - et al.
- 2019
- JES
On the Removal of Insulator Process Induced Radiation Damage from Insulated Gate Field Effect Transistors at Elevated Pressure
- - A. Reisman
  - J.M. Aitken
  - et al.
- 2019
- JES
The Effects of Pressure, Temperature, and Time on the Annealing of lonizing Radiation Induced Insulator Damage in N-channel IGFET's
- - A. Reisman
  - C.J. Merz
- 2019
- JES
Nitridation of silicon in a multiwafer plasma system
- - A. Reisman
  - M. Berkenblit
  - et al.
- 1984
- Journal of Electronic Materials
Heat dissipation from silicon chips in a vertical plate, elevated pressure cold wall system
- - A. Reisman
  - M. Berkenblit
  - et al.
- 1982
- Journal of Electronic Materials