Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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2 results for G.C. Schwartz

Selective reactive ion etching of phosphorus-doped oxide over undoped SiO₂
- - David Vender
  - Gottlieb S. Oehrlein
  - et al.
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reactive ion etching induced corrosion of Al and Al-Cu films
- - Wen-Yaung Lee
  - J.M. Eldridge
  - et al.
- 1981
- Journal of Applied Physics