Computation of static shapes and voltages for micromachined deformable mirrors with nonlinear electrostatic actuators
- P.K.C. Wang
- F.Y. Hadaegh
- 1996
- JMEMS
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.