Detection and modelling of electrode topography effects on particle traps
- M. Dalvie
- M. Surendra
- et al.
- 1994
- Plasma Sources Science and Technology
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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25 results for G.S. Selwyn
The Gaseous Electronics Conference radio-frequency reference cell: A defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma-processing discharges
- P.J. Hargis Jr.
- K.E. Greenberg
- et al.
- 1994
- Review of Scientific Instruments
Self-consistent fluid modeling of radio frequency discharges in two dimensions
- M. Dalvie
- M. Surendra
- et al.
- 1993
- Applied Physics Letters
Detection of particle traps by spatially resolved optical emission spectroscopy over grooved electrodes in radio frequency discharges
- M. Dalvie
- G.S. Selwyn
- et al.
- 1993
- Applied Physics Letters
Phenomenological study of particulates in plasma tools and processes
- G.S. Selwyn
- 1993
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
A phenomenlogical study of particulates in plasma tools and processes
- Gary S. Selwyn
- 1993
- Japanese Journal of Applied Physics
Rastered laser light scattering studies during plasma processing: Particle contamination trapping phenomena
- Gary S. Selwyn
- J. Heidenreich
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Particle trapping phenomena in radio frequency plasmas
- Gary S. Selwyn
- John E. Heidenreich
- et al.
- 1990
- Applied Physics Letters
In situ plasma contamination measurements by HeNe laser light scattering: A case study
- J.S. Mckillop
- Kurt L. Haller
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
In situ laser diagnostic studies of plasma-generated particulate contamination
- G.S. Selwyn
- J. Singh
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films