Phosphorus-Doped Polycrystalline Silicon via LPCVD: I. Process Characterization
- B.S. Meyerson
- W.L. Olbricht
- 2019
- JES
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3 results for W.L. Olbricht
Homogeneous chemical vapor deposition
- B.A. Scott
- W.L. Olbricht
- et al.
- 1984
- JVSTA
Homogeneous chemical vapor deposition of amorphous semiconductor thin films
- B.A. Scott
- W.L. Olbricht
- et al.
- 1983
- Journal of Non-Crystalline Solids