Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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46 results for M. Wittmer

Interdiffusion and precipitation in Al‒Hf thin-film couples
- - M. Wittmer
  - F. Legoues
  - et al.
- 1986
- Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties
Properties and Microelectronic Applications of Thin Films of Refractory Metal Nitrides
- - Marc Wittmer
- 1985
- JVSTA
Low-temperature diffusion of dopant atoms in silicon during interfacial silicide formation
- - M. Wittmer
  - K.N. Tu
- 1984
- Physical Review B
Barrier Layers: Principles and applications in microelectronics
- - Marc Wittmer
- 1984
- JVSTA
Investigation of the Al/TiSi₂/Si contact system
- - Chung Yu Ting
  - Marc Wittmer
- 1983
- Journal of Applied Physics
Reduction of contact resistivity by As redistribution during Pd ₂Si formation
- - I. Ohdomari
  - M. Hori
  - et al.
- 1983
- Journal of Applied Physics
Growth kinetics of platinum silicide
- - Marc Wittmer
- 1983
- Journal of Applied Physics
Redistribution of As during Pd₂Si formation: Electrical measurements
- - M. Wittmer
  - C.-Y. Ting
  - et al.
- 1983
- Journal of Applied Physics
Silicide contacts for shallow junction devices
- - Marc Wittmer
- 1983
- Thin Solid Films
Investigation of Tin films reactively sputtered using a sputter gun
- - K.Y. Ahn
  - M. Wittmer
  - et al.
- 1983
- Thin Solid Films