Development of 157 nm positive resists
- Hiroshi Ito
- G.M. Wallraff
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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127 results for Hiroshi Ito
Investigation of the radical copolymerization and terpolymerization of maleic anhydride and norbornenes by an in situ 1H NMR analysis of kinetics and by the mercury method: Evidence for the lack of charge-transfer-complex propagation
- Hiroshi Ito
- Dolores Miller
- et al.
- 2000
- J Polym Sci Part A
Silyl-protected hydroxystyrenes: living anionic polymerization at room temperature and selective desilylation
- Hiroshi Ito
- Arno Knebelkamp
- et al.
- 2000
- J Polym Sci Part A
Monomer reactivities and kinetics in radical copolymerization of hydroxystyrene derivatives and tert-butyl (meth)acrylate
- Hiroshi Ito
- Charlie Dalby
- et al.
- 2000
- Macromolecules
Kinetics and reactivities in radical copolymerization of maleic anhydride and norbornenes
- Hiroshi Ito
- Dolores Miller
- et al.
- 2000
- American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Chemical amplification resists: History and development within IBM
- Hiroshi ItO
- 2000
- IBM J. Res. Dev
Approaches to etch resistant 193-nm photoresists: Performance and prospects
- R.D. Allen
- Juliann Opitz
- et al.
- 1999
- SPIE Advances in Resist Technology and Processing 1999
Development of APSM resists for sub-200 nm contact holes
- M. Rajaratnam
- M. Reilly
- et al.
- 1999
- Microelectronic Engineering
The "living" free radical synthesis of poly(4-hydroxystyrene): Physical properties and dissolution behavior
- G.G. Barclay
- C.J. Hawker
- et al.
- 1998
- Macromolecules
The "living" free radical synthesis of random and block copolymere containing hydrophobic and hydrophilic moieties: Novel thin film dissolution behavior
- G.G. Barclay
- M. King
- et al.
- 1997
- American Chemical Society, Polymer Preprints, Division of Polymer Chemistry