Correlation between the ion bombardment during film growth of Pd films and their structural and electrical properties
- P. Ziemann
- E. Kay
- 1983
- JVSTA
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2 results for P. Ziemann
A comparison of Mo films bias sputtered in Ar/N2 with related high energy ion implantation experiments
- E. Kay
- P. Ziemann
- 1982
- Journal of Applied Physics