Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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4 results for M. Moisan

Using surface wave produced plasmas to determine the frequency effect upon etching of polyimide in RF and microwave sustained plasmas
- - G. Sauvé
  - M. Moisan
  - et al.
- 1989
- Microelectronic Engineering
Influence of the applied field frequency (27-2450 MHz) in high-frequency sustained plasmas used to etch polyimide
- - G. Sauvé
  - M. Moisan
  - et al.
- 1988
- Applied Physics Letters
Ion energy and anisotropy in microwave plasma etching of polymers
- - J. Heidenreich
  - J. Paraszczak
  - et al.
- 1986
- Microelectronic Engineering
Methods of creation and effect of microwave plasmas upon the etching of polymers and silicon
- - J. Paraszczak
  - J. Heidenreich
  - et al.
- 1985
- Microelectronic Engineering