Plasma-enhanced CVD of high quality insulating films
- J. Batey
- E. Tierney
- et al.
- 1989
- Applied Surface Science
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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18 results for J. Batey
Ballistic electron transport in thin silicon dioxide films
- M.V. Fischetti
- D.J. Dimaria
- et al.
- 1987
- Physical Review B
IIIB-5 Fabrication of Thin Gate Oxide MOSFET's Using Low-Temperature Plasma-Enhanced Chemical-Vapor-Deposited SiO2
- J. Li
- J. Batey
- et al.
- 1987
- IEEE T-ED
Electrical resistivity and radiation damage in boro-hydro-nitride x-ray lithography mask substrates
- S.S. Dana
- J. Batey
- et al.
- 1987
- Microelectronic Engineering
Energy band alignment in GaAs:(Al,Ga)As heterostructures: The dependence on alloy composition
- J. Batey
- S.L. Wright
- 1986
- Journal of Applied Physics
Low-temperature deposition of high-quality silicon dioxide by plasma-enhanced chemical vapor deposition
- J. Batey
- E. Tierney
- 1986
- Journal of Applied Physics
Energy band alignment in GaAs:(Al,Ga)As heterostructures
- J. Batey
- S.L. Wright
- 1986
- Surface Science
Energy band-gap discontinuities in GaAs:(Al,Ga)As heterojunctions
- J. Batey
- S.L. Wright
- et al.
- 1985
- Journal of Applied Physics