Field-assisted bonding below 200°C using metal and glass thin-film interlayers
- W.-Y. Lee
- F.O. Sequeda
- et al.
- 1987
- Applied Physics Letters
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Summary Abstract: Glass and metal thin-film Interlayers for low-temperature field assisted bonding
- W.-Y. Lee
- F.O. Sequeda
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films