Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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50 results for V.V. Patel

Effects of bias and inert gas on properties of diamond-like carbon deposited by d.c. PACVD
- - A. Grill
  - V.V. Patel
- 1994
- Diamond and Related Materials
Tribological properties of diamond-like carbon and related materials
- - A. Grill
  - V.V. Patel
- 1993
- Diamond and Related Materials
Tribological properties of diamond-like carbon and related materials
- - A. Grill
  - V.V. Patel
- 1993
- Diamond and Related Materials
Stresses in diamond-like carbon films
- - Alfred Grill
  - Vishnubhai Patel
- 1993
- Diamond and Related Materials
Characterization of diamondlike carbon by infrared spectroscopy
- - A. Grill
  - V.V. Patel
- 1992
- Applied Physics Letters
Tribological behavior of diamond-like carbon: effects of preparation conditions and annealing
- - A. Grill
  - V.V. Patel
  - et al.
- 1991
- Surface and Coatings Technology
Diamond-like carbon as an electrical insulator of copper devices for chip cooling
- - E. Marotta
  - N. Bakhru
  - et al.
- 1991
- Thin Solid Films
Diamondlike carbon films by rf plasma-assisted chemical vapor deposition from acetylene
- - A. Grill
  - B.S. Meyerson
  - et al.
- 1990
- IBM J. Res. Dev
Composition and structure of boron nitride films deposited by chemical vapor deposition from borazine
- - J. Kouvetakis
  - V.V. Patel
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Inhomogeneous carbon bonding in hydrogenated amorphous carbon films
- - A. Grill
  - B.S. Meyerson
  - et al.
- 1987
- Journal of Applied Physics