Deposition of submicron aerosol particles during integrated circuit manufacturing: Theory
- Douglas W. Cooper
- Robert J. Miller
- et al.
- 1990
- Particulate Science and Technology
Publications
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5 results for M.H. Peters
The effects of electrostatic forces on the thermophoretic suppression of particle diffusional deposition onto hot surfaces
- Michael H Peters
- Douglas W Cooper
- 1990
- Journal of Colloid And Interface Science
The effects of electrostatic and inertial forces on the diffusive deposition of small particles onto large disks: Viscous axisymmetric stagnation point flow approximations
- Michael H. Peters
- Douglas W. Cooper
- et al.
- 1989
- Journal of Aerosol Science
Predicted deposition of submicrometer particles due to diffusion and electrostatics in viscous axisymmetric stagnation-point flow
- Douglas W. Cooper
- Michael H. Peters
- et al.
- 1989
- Aerosol Science and Technology
Mechanisms of contaminant particle production, migration, and adhesion
- R.J. Miller
- Douglas W. Cooper
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films