Decomposition of silane on Si(111)-(7×7) and Si(100)-(2×1) surfaces below 500 °C
- S. Gates
- C.M. Greenlief
- et al.
- 1990
- The Journal of Chemical Physics
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3 results for P.A. Holbert
Absolute coverage and decomposition kinetics of Mono-, Di-, and tri-hydride phases on Si(111)-(7×7)
- C.M. Greenlief
- S. Gates
- et al.
- 1989
- Chemical Physics Letters
Reaction kinetics of surface silicon hydrides
- C. Michael Greenlief
- Stephen M. Gates
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films