Lateral dopant profiling on a 100 nm scale by scanning capacitance microscopy
- C.C. Williams
- J. Slinkman
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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3 results for W.P. Hough
Scanning capacitance microscopy on a 25 nm scale
- C.C. Williams
- W.P. Hough
- et al.
- 1989
- Applied Physics Letters
Lateral dopant profiling with 200 nm resolution by scanning capacitance microscopy
- C.C. Williams
- J. Slinkman
- et al.
- 1989
- Applied Physics Letters