Thermal annealing of light-induced metastable defects in hydrogenated amorphous silicon nitride
- E.D. Tober
- Jerzy Kanicki
- et al.
- 1991
- Applied Physics Letters
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.