Chemical Vapor Deposition of Gallium Nitride from Diethylgallium Azide
- John Kouvetakis
- David B. Beach
- 2002
- Chemistry of Materials
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
3 results for John Kouvetakis
Chemical vapor deposition of highly conductive boron-doped graphite from triphenyl boron
- J. Kouvetakis
- M.W. McElfresh
- et al.
- 1994
- Carbon
Composition and structure of boron nitride films deposited by chemical vapor deposition from borazine
- J. Kouvetakis
- V.V. Patel
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films