Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

Date

Start

End

Featured collections

Popular topics

6 results for A. Henry

Electrical studies on annealed d2 plasma-exposed silicon
- - A. Henry
  - O.O. Awadelkarim
  - et al.
- 2019
- JES
A Study of Luminescent Centers in Reactive-Ion-Etched Silicon
- - T.D. Bestwick
  - G.S. Oehrlein
  - et al.
- 2019
- JES
A photoluminescence study of CF₄ reactive-ion-etched silicon: Various process conditions and magnetically enhanced etching
- - A. Henry
  - B. Monemar
  - et al.
- 1993
- Journal of Applied Physics
Photoluminescence characterization of plasma exposed silicon surfaces
- - A. Henry
  - B. Monemar
  - et al.
- 1991
- Journal of Applied Physics
Electrical studies on plasma and reactive-ion-etched silicon
- - A. Henry
  - O.O. Awadelkarim
  - et al.
- 1989
- Journal of Applied Physics
Effects of deuterium plasma treatments on the electrical properties of boron-doped silicon
- - A. Henry
  - O.O. Awadelkarim
  - et al.
- 1989
- Materials Science and Engineering B