Study of planarization of cobalt silicide lines and silicon surfaces by scanning force microscopy and scanning electron microscopy
- K.-H. Robrock
- K.N. Tu
- et al.
- 1989
- Applied Physics Letters
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
1 result for K.-H. Robrock